Precision Motion Control, Fachbücher von Kok Kiong Tan, Tong Heng Lee, Sunan Huang

This second edition of Precision Motion Control focuses on enabling technologies for precision engineering. It has been extensively edited and rewritten throughout with the following particular areas being expanded or added: - piezoelectric actuators - fine movement control - gantry-stage control - interpolation of quadrature encoder signals - geometrical error modeling for single-, dual- and general-XY-axis stages.